ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.
Product characteristics
High Purity
Ready for press
High strength
High sintering activity
High fluidity
Technical parameter
Item | GS-80 | |
Mean particle size (μm) | 70~120 | |
Y2O3 (WT%) | 5 | |
Bulk density (g/cm3) | 0.8~1.0 | |
Fluidity (s/50g) | 80~100 | |
Impurity | Ca (ppm) | <500 |
Si (ppm) | <100 | |
Fe (ppm) | <30 |
Sintering process
1830~1900℃, hold 3~5 hrs, Flow Nitrogen, 0.1MPa
Debind process
3℃/min before 200℃,2℃/min before 400℃,5℃/min before 500℃,hold 2hrs.
Application
Press ceramics raw material:
ALN heater/ElectroStatic chuck/Etching shield/Hot press ceramics
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