AlN granule

ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.

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Product characteristics

High Purity

1

Ready for press

2

High strength

3

High sintering activity

4

High fluidity

5

Technical parameter


Item

GS-80

 Mean particle size (μm) 

70~120

Y2O3 (WT%)

5

Bulk density (g/cm3)

0.8~1.0

Fluidity (s/50g)

80~100

Impurity

Ca (ppm)

500

Si (ppm)

<100

Fe (ppm)

<30

Sintering process



1830~1900℃, hold 3~5 hrs, Flow Nitrogen, 0.1MPa

Debind process


3℃/min before 200℃,2℃/min before 400℃,5℃/min before 500℃,hold 2hrs.

Application

Press ceramics raw material:

ALN heater/ElectroStatic chuck/Etching shield/Hot press ceramics

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